Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou

By: Madou, Marc JMaterial type: TextTextPublisher number: HCLPublication details: Boca Raton, Fla. CRC Press 2002Edition: 2nd edDescription: 723 p. : col. ill. ; 29 cmISBN: 9780849308260Genre/Form: Marc J Madou | Fundamentals of microfabrication : the science of miniaturization | Microelectronics. | Integrated circuits -- Design and construction. | Microelectromechanical systems -- Design and construction. | Microelectronic packaging. | Lasers -- Industrial applications. DDC classification: 621.38152 MAD
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Item type Current library Call number Status Date due Barcode Item holds
HCL Collection HCL Collection SNU LIBRARY
621.38152 MAD (Browse shelf(Opens below)) Available H11750
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