Introduction to microlithography / M. J. Bowden

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Material type: Text

TextPublisher number: HCLSeries: ACS professional reference bookPublication details: Washington, DC American Chemical Society 1994Edition: 2nd edDescription: xiv, 527 p. : ill. 24 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Barcode
HCL Collection	SNU LIBRARY	621.381531 BOW (Browse shelf(Opens below))	Withdrawn	H8290

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